http://ir-heating-case.com/zh/tags/%E5%BF%AB%E9%80%9F/ Recent content in 快速 on Infrared Heating Applications Hugo zh Sun, 31 May 2026 05:06:34 +0800 http://ir-heating-case.com/zh/posts/rapid-wafer-drying-infrared/ Sun, 31 May 2026 05:06:34 +0800 http://ir-heating-case.com/zh/posts/rapid-wafer-drying-infrared/ <p><img src="http://ir-heating-case.com/images/eeeb9669114c0c0a0b2bef3f902d01a9.png" alt="快速晶圆干燥红外线"></p> <p>在线生产中，时间不是建议，而是界限。旋涂后，晶圆上覆盖着一层薄薄的光刻胶膜，必须进行调理和干燥，才能进行曝光。软烘如果控制不严，光刻胶轮廓会漂移。曝光后的硬烘如果不均匀，蚀刻容差会崩溃。如果最终干燥步骤留下水印或产生颗粒，第二天的良率报告中就会看到代价。</p>