http://ir-heating-case.com/en/tags/cmp/ Recent content in CMP on Infrared Heating Applications Hugo en-us Thu, 02 Jul 2026 09:27:36 +0800 http://ir-heating-case.com/en/posts/post-cmp-wafer-drying-heater/ Thu, 02 Jul 2026 09:27:36 +0800 http://ir-heating-case.com/en/posts/post-cmp-wafer-drying-heater/ <p><img src="http://ir-heating-case.com/images/016cf4f616aaa15e4af48856b8adc51b.png" alt="Post CMP wafer drying heater"></p> <p>On the fab floor, a Post CMP wafer that comes out of the <a href="https://goldisgood.com">slurry</a> still carrying micro-droplets on patterned features is basically a yield hit waiting to happen. Water marks, re-deposition, and pattern collapse tend to show up later—right when you get into lithography and etch. The drying heater isn’t just a “nice-to-have.” It’s the last thermal gate before the wafer leaves the CMP cell.</p>