http://ir-heating-case.com/en/tags/300mm/ Recent content in 300mm on Infrared Heating Applications Hugo en-us Tue, 30 Jun 2026 13:07:50 +0800 http://ir-heating-case.com/en/posts/uniform-heat-for-300mm-wafer-ir/ Tue, 30 Jun 2026 13:07:50 +0800 http://ir-heating-case.com/en/posts/uniform-heat-for-300mm-wafer-ir/ <p><img src="http://ir-heating-case.com/images/e619a459508a95cd74ea4eae0be40cd1.png" alt="Uniform heat for 300mm wafer IR"></p> <p>Out on the 300mm line, you can feel it when the bake profile starts to drift. Linewidths wander, and you start seeing scum after develop. When the hot zone is fighting the setpoint, you’re burning photoresist budget—and yield takes the hit. We built our infrared setup to stop that fight before it starts.</p> <h2 id="what-matters-technically">What matters, technically</h2> <p>The short-wave infrared emitter array is tuned for wafer-level thermal uniformity, holding ±0.1°C across the 300mm surface through soft bake, hard bake, and curing. Fast ramp response cuts thermal lag, so <a href="https://o-yate.com">temperature</a> tracks the recipe without overshoot. The hot zone is cleanroom compatible from Class 1 to Class 100, and it generates zero particles during steady state. You get 24/7 reliability with no unplanned downtime, and repeatability that keeps CD and thickness in spec lot after lot.</p>